Systems and Methods for Optimizing Focus for Imaging-Based Overlay Metrology
US-2018292198-A1 · Oct 11, 2018 · US
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Kla Tencor Corp patents in 2018
Kla Tencor Corp was listed as an assignee on 2 patent publications in 2018.
| Metric | Value |
|---|---|
| Company | Kla Tencor Corp |
| Year | 2018 |
| Patents | 2 |
Patents
Representative publications for Kla Tencor Corp in 2018.
Top CPC classifications
Most common classification codes for Kla Tencor Corp in 2018.
| CPC | Patents |
|---|---|
| G01B2210/56 | 2 |
| G01B11/02 | 1 |
| G01B11/24 | 1 |
| G01B11/2441 | 1 |
| G01B11/272 | 1 |
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