Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
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Stuehler Joachim — Physics
Stuehler Joachim holds 2 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Stuehler Joachim |
| Technology | Physics |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2018 |
Representative patents
Notable publications linking Stuehler Joachim to Physics.
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Recent filings
Latest patents from Stuehler Joachim in Physics.
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
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