Impurity-doped layer formation apparatus and electrostatic chuck protection method
US-9312163-B2 · Apr 12, 2016 · US
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Tanaka Masaru — Cross-Sectional Technologies
Tanaka Masaru holds 1 patent in Cross-Sectional Technologies, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Tanaka Masaru |
| Technology | Cross-Sectional Technologies |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Representative patents
Notable publications linking Tanaka Masaru to Cross-Sectional Technologies.
Recent filings
Latest patents from Tanaka Masaru in Cross-Sectional Technologies.
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