Radiation source
US-9632419-B2 · Apr 25, 2017 · US
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Stamm Uwe Bruno Heini — Physics
Stamm Uwe Bruno Heini holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Stamm Uwe Bruno Heini |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking Stamm Uwe Bruno Heini to Physics.
Radiation source
US-9632419-B2 · Apr 25, 2017 · US
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
US-9110377-B2 · Aug 18, 2015 · US
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
US-9110377-B2 · Aug 18, 2015 · US
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
US-9110377-B2 · Aug 18, 2015 · US
Recent filings
Latest patents from Stamm Uwe Bruno Heini in Physics.
Radiation source
US-9632419-B2 · Apr 25, 2017 · US
Radiation source
US-9632419-B2 · Apr 25, 2017 · US
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
US-9110377-B2 · Aug 18, 2015 · US
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
US-9110377-B2 · Aug 18, 2015 · US
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
US-9110377-B2 · Aug 18, 2015 · US
Related pages
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