Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
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Hembacher Stefan — Physics
Hembacher Stefan holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Hembacher Stefan |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking Hembacher Stefan to Physics.
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical arrangement in a microlithographic projection exposure apparatus
US-9250417-B2 · Feb 2, 2016 · US
Recent filings
Latest patents from Hembacher Stefan in Physics.
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical arrangement in a microlithographic projection exposure apparatus
US-9250417-B2 · Feb 2, 2016 · US
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