Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
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Cymer LLC — Physics
Cymer LLC holds 2 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Cymer LLC |
| Technology | Physics |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Cymer LLC to Physics.
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Recent filings
Latest patents from Cymer LLC in Physics.
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
US-9280053-B2 · Mar 8, 2016 · US
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