Systems and methods for in-situ etching prior to physical vapor deposition in the same chamber
US-2024167144-A1 · May 23, 2024 · US
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Oem Group Llc patents
Oem Group Llc holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 1 |
| First publication | Jun 17, 2021 |
| Latest publication | May 23, 2024 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Layered Ferroelectric Sc(x)Al(1-x)N Transducer
US-2021258697-A1 · Aug 19, 2021 · US
Manufacturing of c-axis textured sidewall aln films
US-2021184652-A1 · Jun 17, 2021 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Systems and methods for in-situ etching prior to physical vapor deposition in the same chamber
US-2024167144-A1 · May 23, 2024 · US
Layered Ferroelectric Sc(x)Al(1-x)N Transducer
US-2021258697-A1 · Aug 19, 2021 · US
Manufacturing of c-axis textured sidewall aln films
US-2021184652-A1 · Jun 17, 2021 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| B06B1/0681 | 1 |
| H04R17/00 | 1 |
| H01L27/20 | 1 |
| H10N30/501 | 1 |
| H10N39/00 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Operations & Transport | 1 |
| Chemistry & Metallurgy | 1 |