Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
US-9540731-B2 · Jan 10, 2017 · US
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Noorbakhsh Hamid — Electricity
Noorbakhsh Hamid holds 2 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Noorbakhsh Hamid |
| Technology | Electricity |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2017 |
Representative patents
Notable publications linking Noorbakhsh Hamid to Electricity.
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
US-9540731-B2 · Jan 10, 2017 · US
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
US-9540731-B2 · Jan 10, 2017 · US
Feedforward temperature control for plasma processing apparatus
US-9338871-B2 · May 10, 2016 · US
Feedforward temperature control for plasma processing apparatus
US-9338871-B2 · May 10, 2016 · US
Recent filings
Latest patents from Noorbakhsh Hamid in Electricity.
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
US-9540731-B2 · Jan 10, 2017 · US
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
US-9540731-B2 · Jan 10, 2017 · US
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
US-9540731-B2 · Jan 10, 2017 · US
Feedforward temperature control for plasma processing apparatus
US-9338871-B2 · May 10, 2016 · US
Feedforward temperature control for plasma processing apparatus
US-9338871-B2 · May 10, 2016 · US
Related pages
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