Magnetron sputtering apparatus
US-9812302-B2 · Nov 7, 2017 · US
Ohmi Tadahiro was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Ohmi Tadahiro |
| Year | 2017 |
| Patents | 1 |
Representative publications for Ohmi Tadahiro in 2017.
US-9812302-B2 · Nov 7, 2017 · US
Most common classification codes for Ohmi Tadahiro in 2017.
| CPC | Patents |
|---|---|
| C23C14/35 | 1 |
| H01J37/32495 | 1 |
| H01J37/3405 | 1 |
| H01J37/3408 | 1 |
| H01J37/3441 | 1 |
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