Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
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Chang Yu — Electricity
Chang Yu holds 2 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Chang Yu |
| Technology | Electricity |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Chang Yu to Electricity.
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Recent filings
Latest patents from Chang Yu in Electricity.
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Substrate support for substrate backside contamination control
US-9490150-B2 · Nov 8, 2016 · US
Related pages
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