Method for forming a hard mask pattern and method for manufacturing a semiconductor device using the same
US-9793472-B2 · Oct 17, 2017 · US
Lee Yongkyu was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Lee Yongkyu |
| Year | 2017 |
| Patents | 1 |
Representative publications for Lee Yongkyu in 2017.
Most common classification codes for Lee Yongkyu in 2017.
| CPC | Patents |
|---|---|
| H01L21/0273 | 1 |
| H01L21/266 | 1 |
| H01L43/12 | 1 |
| H10B61/22 | 1 |
| H10N50/01 | 1 |
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