Method and system for cleaning semiconductor substrate
US-10032623-B2 · Jul 24, 2018 · US
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Yamakawa Haruyoshi patents
Yamakawa Haruyoshi holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Jun 16, 2016 |
| Latest publication | Jul 24, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Liquid heater
US-9791169-B2 · Oct 17, 2017 · US
Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatus
US-9593424-B2 · Mar 14, 2017 · US
Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system
US-2016172185-A1 · Jun 16, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and system for cleaning semiconductor substrate
US-10032623-B2 · Jul 24, 2018 · US
Liquid heater
US-9791169-B2 · Oct 17, 2017 · US
Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatus
US-9593424-B2 · Mar 14, 2017 · US
Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system
US-2016172185-A1 · Jun 16, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Operations & Transport | 3 |
| Chemistry & Metallurgy | 3 |
| Electricity | 3 |
| Mechanical Engineering | 1 |
| Physics | 1 |