Method and device for inspecting spatial light modulator, and exposure method and device
US-10317346-B2 · Jun 11, 2019 · US
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Fujiwara Tomoharu patents
Fujiwara Tomoharu holds 6 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 6 |
| Recent patents | 0 |
| First publication | Jan 27, 2015 |
| Latest publication | Jun 11, 2019 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Spatial light modulator, method of driving same, and exposure method and apparatus
US-10054858-B2 · Aug 21, 2018 · US
Exposure method, exposure apparatus, and device manufacturing method
US-9335639-B2 · May 10, 2016 · US
Spatial light modulator, exposure apparatus, and method for manufacturing device
US-9291814-B2 · Mar 22, 2016 · US
Immersion lithographic apparatus rinsing outer contour of substrate with immersion space
US-8941808-B2 · Jan 27, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and device for inspecting spatial light modulator, and exposure method and device
US-10317346-B2 · Jun 11, 2019 · US
Spatial light modulator, method of driving same, and exposure method and apparatus
US-10054858-B2 · Aug 21, 2018 · US
Exposure method, exposure apparatus, and device manufacturing method
US-9335639-B2 · May 10, 2016 · US
Spatial light modulator, exposure apparatus, and method for manufacturing device
US-9291814-B2 · Mar 22, 2016 · US
Immersion lithographic apparatus rinsing outer contour of substrate with immersion space
US-8941808-B2 · Jan 27, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 6 |
| Electricity | 1 |