Filter for material supply apparatus of an extreme ultraviolet light source
US-9029813-B2 · May 12, 2015 · US
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Vaschenko Georgiy O patents in 2015
Vaschenko Georgiy O was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Vaschenko Georgiy O |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Vaschenko Georgiy O in 2015.
Top CPC classifications
Most common classification codes for Vaschenko Georgiy O in 2015.
| CPC | Patents |
|---|---|
| B01D29/56 | 1 |
| B22F3/105 | 1 |
| G03F7/70033 | 1 |
| G03F7/70483 | 1 |
| G03F7/70825 | 1 |
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