Substrate processing system with mechanically floating target assembly
US-9303311-B2 · Apr 5, 2016 · US
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Miller Keith A patents
Miller Keith A holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Jun 11, 2015 |
| Latest publication | Apr 5, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Substrate processing system having symmetric RF distribution and return paths
US-9255322-B2 · Feb 9, 2016 · US
Wafer processing deposition shielding components
US-9062379-B2 · Jun 23, 2015 · US
Wafer processing deposition shielding components
US-2015162171-A9 · Jun 11, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Substrate processing system with mechanically floating target assembly
US-9303311-B2 · Apr 5, 2016 · US
Substrate processing system having symmetric RF distribution and return paths
US-9255322-B2 · Feb 9, 2016 · US
Wafer processing deposition shielding components
US-9062379-B2 · Jun 23, 2015 · US
Wafer processing deposition shielding components
US-2015162171-A9 · Jun 11, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 4 |
| Electricity | 4 |