Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures
US-9540230-B2 · Jan 10, 2017 · US
Lim Martin was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Lim Martin |
| Year | 2017 |
| Patents | 1 |
Representative publications for Lim Martin in 2017.
Most common classification codes for Lim Martin in 2017.
| CPC | Patents |
|---|---|
| B81B7/02 | 1 |
| B81C1/0023 | 1 |
| B81C1/00293 | 1 |
| B81C2203/0145 | 1 |
| B81C2203/019 | 1 |
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