Method and apparatus for selective nitridation process
US-10049881-B2 · Aug 14, 2018 · US
Hwang Bernard L was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Hwang Bernard L |
| Year | 2018 |
| Patents | 1 |
Representative publications for Hwang Bernard L in 2018.
US-10049881-B2 · Aug 14, 2018 · US
Most common classification codes for Hwang Bernard L in 2018.
| CPC | Patents |
|---|---|
| H01J37/32357 | 1 |
| H01J37/32422 | 1 |
| H01L21/02247 | 1 |
| H01L21/02252 | 1 |
| H01L21/28273 | 1 |
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