Substrate support with heater
US-10242890-B2 · Mar 26, 2019 · US
Volfovski Leon was listed as an assignee on 1 patent publication in 2019.
| Metric | Value |
|---|---|
| Company | Volfovski Leon |
| Year | 2019 |
| Patents | 1 |
Representative publications for Volfovski Leon in 2019.
US-10242890-B2 · Mar 26, 2019 · US
Most common classification codes for Volfovski Leon in 2019.
| CPC | Patents |
|---|---|
| H01L21/67109 | 1 |
| H01L21/6875 | 1 |
| H05B2203/005 | 1 |
| H05B2203/007 | 1 |
| H05B2203/037 | 1 |
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