Liquid arm cleaning unit for substrate processing apparatus
US-9190311-B2 · Nov 17, 2015 · US
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Itoh Norihiro patents in 2015
Itoh Norihiro was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Itoh Norihiro |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Itoh Norihiro in 2015.
Top CPC classifications
Most common classification codes for Itoh Norihiro in 2015.
| CPC | Patents |
|---|---|
| H01L21/67051 | 2 |
| H10P72/0414 | 2 |
| B08B3/04 | 1 |
| B08B3/041 | 1 |
| H01L21/67017 | 1 |
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