Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
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Saenger Ingo — Physics
Saenger Ingo holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Saenger Ingo |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Representative patents
Notable publications linking Saenger Ingo to Physics.
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Recent filings
Latest patents from Saenger Ingo in Physics.
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
US-9316920-B2 · Apr 19, 2016 · US
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