Substrate cleaning apparatus and vacuum processing system
US-9214364-B2 · Dec 15, 2015 · US
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Shimizu Akitaka patents in 2015
Shimizu Akitaka was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Shimizu Akitaka |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Shimizu Akitaka in 2015.
Top CPC classifications
Most common classification codes for Shimizu Akitaka in 2015.
| CPC | Patents |
|---|---|
| C23C16/45563 | 1 |
| C23C16/45574 | 1 |
| C23C16/45582 | 1 |
| C23C16/45587 | 1 |
| H01J37/321 | 1 |
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