Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
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Horiuchi Takashi — Physics
Horiuchi Takashi holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Horiuchi Takashi |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2015 |
Representative patents
Notable publications linking Horiuchi Takashi to Physics.
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Recent filings
Latest patents from Horiuchi Takashi in Physics.
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
US-9110381-B2 · Aug 18, 2015 · US
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