Substrate processing apparatus, substrate processing method, and storage medium
US-2023253219-A1 · Aug 10, 2023 · US
Tokyo Electron Ltd holds 7 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 7 |
| Recent patents | 1 |
| First publication | Aug 2, 2018 |
| Latest publication | Aug 10, 2023 |
Year-over-year patent counts for this assignee.
Latest publications where this party is an assignee.
US-2023253219-A1 · Aug 10, 2023 · US
US-2023154745-A1 · May 18, 2023 · US
US-2020152472-A1 · May 14, 2020 · US
US-10276384-B2 · Apr 30, 2019 · US
US-2018218909-A1 · Aug 2, 2018 · US
Representative or frequently cited publications from precomputed assignee stats.
US-2023253219-A1 · Aug 10, 2023 · US
US-2023154745-A1 · May 18, 2023 · US
US-2020152472-A1 · May 14, 2020 · US
US-10276384-B2 · Apr 30, 2019 · US
US-2018218909-A1 · Aug 2, 2018 · US
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 7 |
| Physics | 2 |
| Chemistry & Metallurgy | 1 |
Answers are generated from the same data shown on this page.