Sputtering target having increased life and sputtering uniformity
US-8968536-B2 · Mar 3, 2015 · US
Yu Sang-Ho was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Yu Sang-Ho |
| Year | 2015 |
| Patents | 1 |
Representative publications for Yu Sang-Ho in 2015.
Most common classification codes for Yu Sang-Ho in 2015.
| CPC | Patents |
|---|---|
| C23C14/14 | 1 |
| C23C14/34 | 1 |
| C23C14/3407 | 1 |
| C23C14/54 | 1 |
| H01J37/3423 | 1 |
Navigate to parent entity pages.