Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
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Kugler Jens patents
Kugler Jens holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Mar 24, 2015 |
| Latest publication | Nov 14, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Optical arrangement in a microlithographic projection exposure apparatus
US-9250417-B2 · Feb 2, 2016 · US
Optical element unit for exposure processes having sealing element
US-9046795-B2 · Jun 2, 2015 · US
Support elements for an optical element
US-8988654-B2 · Mar 24, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
US-9817322-B2 · Nov 14, 2017 · US
Optical arrangement in a microlithographic projection exposure apparatus
US-9250417-B2 · Feb 2, 2016 · US
Optical element unit for exposure processes having sealing element
US-9046795-B2 · Jun 2, 2015 · US
Support elements for an optical element
US-8988654-B2 · Mar 24, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 4 |
| Cross-Sectional Technologies | 1 |