Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
US-2018353876-A1 · Dec 13, 2018 · US
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Acm Research Shanghai Inc patents in 2018
Acm Research Shanghai Inc was listed as an assignee on 15 patent publications in 2018.
| Metric | Value |
|---|---|
| Company | Acm Research Shanghai Inc |
| Year | 2018 |
| Patents | 15 |
Patents
Representative publications for Acm Research Shanghai Inc in 2018.
Apparatus and method for cleaning semiconductor wafer
US-10141205-B2 · Nov 27, 2018 · US
Apparatus for holding a substrate
US-2018320285-A1 · Nov 8, 2018 · US
Method and apparatus for uniformly metallization on substrate
US-10113244-B2 · Oct 30, 2018 · US
Hybrid substrate processing system for dry and wet process and substrate processing method thereof
US-2018308729-A1 · Oct 25, 2018 · US
Top CPC classifications
Most common classification codes for Acm Research Shanghai Inc in 2018.
| CPC | Patents |
|---|---|
| H10P72/0414 | 8 |
| B08B3/08 | 6 |
| B08B3/12 | 6 |
| H01L21/67051 | 6 |
| H10P70/15 | 4 |
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