Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
This page is not indexed by search engines while we improve data quality.
Tanitsu Osamu — Physics
Tanitsu Osamu holds 7 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Tanitsu Osamu |
| Technology | Physics |
| Patents in slice | 7 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2018 |
Representative patents
Notable publications linking Tanitsu Osamu to Physics.
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Recent filings
Latest patents from Tanitsu Osamu in Physics.
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US-10007194-B2 · Jun 26, 2018 · US
Related pages
Navigate to parent entity pages.