Method and device for generating a plasma excited by a microwave energy in the electron cyclotron resonance (ecr) domain, in order to carry out a surface treatment or produce a coating around a filiform element
US-2017032939-A1 · Feb 2, 2017 · US
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Luxembourg Inst Of Science And Tech (List) patents in 2017
Luxembourg Inst Of Science And Tech (List) was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Luxembourg Inst Of Science And Tech (List) |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Luxembourg Inst Of Science And Tech (List) in 2017.
Top CPC classifications
Most common classification codes for Luxembourg Inst Of Science And Tech (List) in 2017.
| CPC | Patents |
|---|---|
| C23C16/511 | 1 |
| H01J2237/3321 | 1 |
| H01J37/32 | 1 |
| H01J37/32192 | 1 |
| H01J37/32403 | 1 |
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