Method for manufacturing integrated circuit devices, optical devices, micromachines and mechanical precision devices having patterned material layers with line-space dimensions of 50 nm and less
US-9184057-B2 · Nov 10, 2015 · US
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Bittner Christian — Electricity
Bittner Christian holds 1 patent in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Bittner Christian |
| Technology | Electricity |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2015 |
Representative patents
Notable publications linking Bittner Christian to Electricity.
Recent filings
Latest patents from Bittner Christian in Electricity.
Method for manufacturing integrated circuit devices, optical devices, micromachines and mechanical precision devices having patterned material layers with line-space dimensions of 50 nm and less
US-9184057-B2 · Nov 10, 2015 · US
Method for manufacturing integrated circuit devices, optical devices, micromachines and mechanical precision devices having patterned material layers with line-space dimensions of 50 nm and less
US-9184057-B2 · Nov 10, 2015 · US
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