Method and apparatus for reducing particle defects in plasma etch chambers
US-10658161-B2 · May 19, 2020 · US
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Shen Meihua patents
Shen Meihua holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Jan 3, 2017 |
| Latest publication | May 19, 2020 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32862 | 2 |
| H01J37/3244 | 1 |
| Y10S438/905 | 1 |
| B08B7/0035 | 1 |
| B08B5/00 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 2 |
| Operations & Transport | 1 |
| Chemistry & Metallurgy | 1 |
| Cross-Sectional Technologies | 1 |